High Energy Heavy Ion Beam Enhanced Adhesion of Gold Films to GaAs

Author: Paine, Scott Nelson

Year: 1984

Degree: Senior thesis (Major)

Advisor: Tombrello, Thomas A.

Committee Member: None, None

Option: Applied Physics

DOI: 10.7907/Z9XD0ZWZ

Abstract

Improvement of the adhesion of gold films to GaAs substrates by irradiation with a beam of high energy heavy ions was studied by Scotch Tape, scrub, and scratch test methods. Simple measurements of the effect of irradiation on the electrical contact properties of the Au/GaAs interface were also made. Substrate materials were taken from four differently doped GaAs wafers, thus providing a selection of substrate electronic properties.

The results indicate dependence of the ion dose threshold for improved adhesion on the bulk electronic properties of the substrate.

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