The Design and Implementation of a Reticle Maker for VLSI

Author: Gray, Moshe

Year: 1981

Degree: Master's thesis

Advisor: Unknown, Unknown

Committee Member: None, None

Option: Computer Science

DOI: 10.7907/0v5p-7011

Abstract

This paper describes the designing and building of a feedback controlled Reticle Maker for the VLSI industry. The machine is based on an innovative design of an XY photo plotter which utilizes flexures and linear motors as a means to raster scan a photographic plate. The accuracy of the machine is based on Laser Interferometery and feedback control.

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