Optimization of NEMS for Frequency Shift Sensing Applications

Author: Bullard, Elizabeth Caryn

Year: 2016

Degree: Dissertation (Ph.D.)

Advisor: Roukes, Michael Lee

Committee Members: Roukes, Michael Lee; Cross, Michael Clifford; Painter, Oskar J.; Yeh, Nai-Chang

Option: Physics

DOI: 10.7907/Z9GH9FZ2

Abstract

This thesis has two areas of focus: the application of the dynamic similarity principle in microelectromechancial systems (MEMS) and nanoelectromechanical systems (NEMS) and the study of anomalous phase noise (APN) in MEMS and NEMS. In the first portion of the thesis, we employ the dynamic similarity principle to predict the quality factor due to gas damping in MEMS and NEMS. In the second portion of the thesis, we provide a theoretical framework for sources of phase noise in MEMS and NEMS and describe the measurements that we made to quantify the temperature dependence of anomalous phase noise in silicon doubly clamped beams.

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