Number of items:
1
.
Hubbard, Ted J.
(1994)
MEMS design : the geometry of silicon micromachining.
Dissertation (Ph.D.), California Institute of Technology.
doi:10.7907/TK4C-M144.
https://resolver.caltech.edu/CaltechETD:etd-09162005-134646
This list was generated on
Wed Dec 17 12:08:54 2025 UTC
.
