Number of items:
1
.
Ma, Lin
(2001)
Robust mask-layout and process synthesis in micro-electro-mechanical-systems (MEMS) using genetic algorithms.
Dissertation (Ph.D.), California Institute of Technology.
doi:10.7907/e8hm-z754.
https://resolver.caltech.edu/CaltechETD:etd-08302005-131428
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