Number of items:
1
.
Yao, Tze-Jung
(2002)
Parylene for MEMS Applications.
Dissertation (Ph.D.), California Institute of Technology.
doi:10.7907/caxb-sr18.
https://resolver.caltech.edu/CaltechETD:etd-07202004-135306
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Wed Dec 17 19:27:24 2025 UTC
.