CaltechTHESIS
  A Caltech Library Service
Login Search

Browse by Eprint ID

Up a level
Number of items: 1 .

Henry, Michael David (2010) ICP Etching of Silicon for Micro and Nanoscale Devices. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/Z9MW2FBC. https://resolver.caltech.edu/CaltechTHESIS:05262010-152815609

This list was generated on Wed Dec 17 18:11:58 2025 UTC .
CaltechTHESIS is powered by EPrints 3.3 which is developed by the School of Electronics and Computer Science at the University of Southampton. More information and software credits .